Easy IntegrationMultiple SpecsHigh Reliability
Mass Flow Controller (MFC)
KC300系列
KC300系列热式气体质量流量控制器采用MEMS热式流量传感技术，具有高精度、快速响应、稳定性好等特点。支持4-20mA模拟信号输入输出控制和RS485/Modbus RTU通讯，适用于工业自动化、环境监测、实验室研究等领域。
Key Takeaways
- High-precision measurement & control, professional Mass Flow Controller (MFC) solution
- MEMS thermal flow sensor chip technology for fast response
- Supports RS485/Modbus/4-20mA multiple communication protocols
- Widely used in semiconductor, new energy, biopharma industries
- Professional selection support and complete after-sales service
Key Specifications
量程范围10~500 SCCM / 1~300 SLM
控制精度±1.0% S.P.
测量精度±1.0% F.S.
量程比100:1
响应时间控制<1.5s (T90) / 测量<50ms
通讯接口RS485 / Modbus RTU / 4-20mA
Applications
Water Treatment
Analytics
Other Industries
AI Data Center
Oil & Gas
Food & Pharma
Model Specifications
| 基本参数 | |
| 介质类型 | 空气、氮气、氧气、甲烷、氩气、二氧化碳、氦气、氢气、丙烷等 |
| 量程范围 | 小流量型：10, 20, 50, 100, 200, 500 SCCM 大流量型：1, 2, 5, 10, 20, 50, 100, 200, 300 SLM 其他量程可定制，详情请咨询 |
| 控制精度 | ±1.0% S.P.（设定值百分比） |
| 测量精度 | ±1.0% F.S.（满量程百分比） |
| 量程比 | 100:1 |
| 控制响应时间 | <1.5s (T90) |
| 测量响应时间 | <50ms |
| 重复性 | ±0.5% F.S. |
| 零点漂移 | ±1% F.S./年 |
| 泄漏率 | 内泄漏<0.5% F.S. 外泄漏<1×10⁻⁹ atm cc/s He |
| 最大耐压 | 3.0 MPa |
| 环境条件 | |
| 工作温度 | -10~55℃ |
| 储存温度 | -20~70℃ |
| 测量工作压力 | 0~1.5 MPa |
| 控制工作压力 | 根据具体量程规格确定 |
| 电气参数 | |
| 供电电压 | DC 24V ±10% |
| 功耗 | <10W |
| 启动时间 | <3s |
| 控制与通讯 | |
| 阀类型 | 常闭型电磁比例阀 |
| 控制信号输入 | 4~20mA |
| 流量信号输出 | 4~20mA |
| 数字通讯 | RS485 / Modbus RTU协议 |
| 机械参数 | |
| 气路材质 | 316L不锈钢 |
| 密封材质 | Viton (FKM) |
| 接口类型 | 卡套、VCR、NPT等可选 |
| 重量 | 约0.8kg |
•除非另有说明，本产品在以下条件下校准：氮气、25℃、水平放置。
•控制精度指误差占设定值百分比（%S.P.）。
•测量精度指误差占满量程百分比（%F.S.）。
•T90响应时间指达到最终稳定值90%所需时间。
•工作压力指入口与出口之间的压差。
Key Features
Easy Integration
Standard interface design
Multiple Specs
Common connections
High Reliability
Industrial grade quality
Stable Signal
Anti-interference design
Good Compatibility
Compatible with many devices
Plug & Play
No debugging required
Applications
Water Treatment
Analytics
Other Industries
AI Data Center
Oil & Gas
Food & Pharma
Downloads
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Frequently Asked Questions
Disclaimer: The content on this page is for reference only and does not constitute any offer or commitment. Product specifications and parameters are subject to change without notice. Please refer to the actual product manual.
Last Updated: 2026-08-07(Content updated regularly)