KC600 Series
KC600 Series gas mass flow controller adopts new generation industrial-grade flow sensor chip combined with gas path structure, dual-screen display, supports range adjustment. Fast response, high precision, equipped with dedicated host software, certified product. Suitable for semiconductor, photovoltaic, vacuum coating and other fields.
Key Specifications
Applications
Model Specifications
| Basic Parameters | |
| Media Requirement | Clean, dry, non-corrosive gas |
| Media Type | Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc. |
| Flow Range¹ (N2 equivalent) | (0~20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10, 20) slm Other ranges customizable, please contact us |
| Accuracy | ±0.3%F.S.² (≤30%F.S.) ±1.0%S.P.³ (>30%F.S.) |
| Turndown Ratio | 100:1 |
| Response Time⁴ | ≤0.5s |
| Repeatability | ≤±0.2%F.S. |
| Resolution | 0.001 sccm, ≤20 sccm 0.01 sccm, ≤100 sccm and >20 sccm 0.1 sccm, ≤1 slm and >100 sccm 1 sccm, >1 slm |
| Leak Rate | ≤1×10⁻¹⁰ Pam³/sHe |
| Max Pressure Rating | 9.8bar |
| Environmental Conditions | |
| Operating Temperature | 0~50℃ |
| Operating Humidity | 10%~90% R.H. (no condensation) |
| Working Pressure⁵ | 0.5~4 bar, >2 slm 0.5~6 bar, ≤2 slm (range dependent) |
| Storage Temperature | -20~85℃ |
| Electrical Parameters | |
| Power Supply | DC24V |
| Power Consumption | ≤4.0W |
| Startup Time | ≤1s |
| Communication Interface | |
| Interface Type | D-SUB9, RJ45 |
| Analog Control | 0-5V or 4-20mA |
| Digital Control | RS485 or RS232 |
| Digital Signal (RS485/RS232) | |
| Interface Type | D-SUB9 or RJ45 |
| Baud Rate | 9600, 38400, 115200 (default) |
| Protocol | Modbus-RTU |
| Device Address | 1 (default) ~99 |
| Mechanical Parameters | |
| Connector Type | Ferrule: 1/4 inch VCR: 1/4 inch Others available |
| Wetted Materials | 316L stainless steel, fluororubber, silica |
| Body Material | Base: 316L stainless steel Housing: Aluminum alloy |
| Seal Material | FKM fluororubber |
| Weight | 0.95kg |
•Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5 bar differential pressure (inlet 3.5 barA, outlet 1 barA), horizontal position.
•It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise accuracy deviation may occur.
•It is recommended to use the largest possible fittings at the inlet and outlet to avoid additional pressure loss.
•The shown ranges are available for nitrogen.
•%F.S. means error as percentage of full scale.
•%S.P. means error as percentage of setpoint.
•Response time refers to time to reach ±2% of setpoint.
•Working pressure refers to differential pressure between inlet and outlet.
Key Features
High Range Ratio
100:1 turndown
Fast Response
≤100ms control
Explosion Proof
ExdIICT4 rating
High Precision
±1.0%F.S. accuracy
Digital Control
RS485 communication
Multiple Interfaces
Various connection sizes
Applications
Downloads
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