KC200 Series
KC200 Series high-performance MFC is customized for high-end equipment, featuring anti-pollution, dust-proof, corrosion resistance. Simple maintenance, cost-effective, short delivery time. Supports EtherCAT and RS485 versions, suitable for semiconductor, photovoltaic, vacuum coating and other industries.
Key Specifications
Applications
Model Specifications
| Basic Parameters | |
| Media Requirement | Clean, dry gas |
| Media Type | Air, nitrogen, oxygen, carbon dioxide, hydrogen, methane, ammonia, silane, boron trichloride, chlorine, etc. |
| Flow Range¹ (N2 equivalent) | (0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10, 20, 50) slm (0~100, 200, 400) slm ——Ranges ≥100 slm use external valve structure ——Other ranges available, please contact us |
| Accuracy | ±0.3%F.S.² (≤30%F.S.) ——%F.S. means error as percentage of full scale ±1.0%S.P.³ (>30%F.S.) ——%S.P. means error as percentage of setpoint |
| Turndown Ratio | 50:1 |
| Response Time⁴ | Controller: ≤1s Meter: ≤10ms ——Response time refers to time to reach ±2% of setpoint or final stable value |
| Repeatability | ≤±0.2%F.S. |
| Resolution | 0.01 sccm, ≤100 sccm 1 sccm, >100 sccm |
| Leak Rate | FKM seal: ≤4×10⁻¹⁰ Pam³/sHe All-metal seal: ≤1×10⁻¹² Pam³/sHe ——All-metal seal version not available for ranges ≥100 slm |
| Max Pressure Rating | 10bar |
| Environmental Conditions | |
| Operating Temperature | 0~50℃ |
| Operating Humidity | 10%~90% R.H. (no condensation) |
| Working Pressure⁵ | Controller: max 6 bar (customizable) Meter: 10 bar ——Working pressure refers to differential pressure between inlet and outlet |
| Storage Temperature | -20~85℃ |
| Electrical Parameters | |
| Power Supply | DC24V |
| Power Consumption | ≤2.7W |
| Startup Time | ≤1s |
| Communication Interface | |
| EtherCAT Version | RJ45 dual port (with LED), device address 1-999 Configurable via host software or command |
| RS485 Version | DB9M interface or RJ45 dual port; Modbus-RTU protocol MKS protocol optional; device address 1-99 Baud rate supports 9600, 19200 (default), 38400, etc. Configurable via DIP switch |
| Analog Signal (RS485 version optional) | 0-5V or 4-20mA (via DB9M interface) |
| Display | EtherCAT version: Yes (located on top) RS485 version: No |
| Mechanical Parameters | |
| Connector Type | Ferrule: 1/4inch, 1/2inch; VCR: 1/4inch, 1/2inch; Others available |
| Wetted Materials | FKM seal: 316L stainless steel, fluororubber, silicon nitride All-metal seal: 316L stainless steel ——All-metal seal version not available for ranges ≥100 slm |
| Body Material | Base: 316L stainless steel Housing: Aluminum alloy |
| Seal Material | FKM fluororubber or all-metal |
| Weight | Controller: 0.85kg~2.8kg Meter: 0.80kg |
•Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5 bar differential pressure (inlet 3.5 barA, outlet 1 barA), horizontal position.
•It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise accuracy deviation may occur.
•It is recommended to use the largest possible fittings at the inlet and outlet to avoid additional pressure loss.
•The shown ranges are available for nitrogen.
•%F.S. means error as percentage of full scale.
•%S.P. means error as percentage of setpoint.
•Response time refers to time to reach ±2% of setpoint.
•Working pressure refers to differential pressure between inlet and outlet.
Key Features
Ultra Fast
≤5ms response
High Precision
±0.5%F.S. accuracy
Dual Display
Flow/Total dual display
MEMS Chip
Proprietary technology
Long-term Stable
No periodic calibration
Multi-comm
RS485/Analog
Applications
Downloads
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