KC800 Series
KC800 Series pressure-insensitive digital mass flow controller features high precision flow control, full range fast response, pressure-insensitive characteristics, range/gas switching function. Built-in display, user-friendly operation, strictly follows SEMI standards. Designed for semiconductor processes.
Key Takeaways
- High-precision measurement & control, professional Mass Flow Controller (MFC) solution
- MEMS thermal flow sensor chip technology for fast response
- Supports RS485/Modbus/4-20mA multiple communication protocols
- Widely used in semiconductor, new energy, biopharma industries
- Professional selection support and complete after-sales service
Key Specifications
Applications
Model Specifications
| Basic Parameters | |
| Media Requirement | Clean, dry gas |
| Flow Range¹ (N2 equivalent) | (0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10) slm Other ranges customizable, please contact us |
| Accuracy | ±1.0%S.P.² (>25%F.S.) ±0.25%F.S.³ (≤25%F.S.) |
| Turndown Ratio | 50:1 |
| Response Time⁴ | ≤1s |
| Linearity | ≤±0.5%F.S. |
| Repeatability | ≤±0.2%F.S. |
| Leak Rate | ≤1×10⁻⁹ Pam³/sHe |
| Pressure Characteristics | |
| Working Pressure Diff | 50~300 kPa |
| Pressure Fluctuation Compensation | ≤±(5.0%S.P.+1.5%F.S.) @5psi/s |
| Max Pressure Rating | 500 kPa |
| Environmental Conditions | |
| Operating Temperature | 0~50℃ |
| Operating Humidity | 10%~90% R.H. (no condensation) |
| Storage Temperature | -20~85℃ |
| Electrical Parameters | |
| Power Supply | DC24V |
| Power Consumption | ≤4.0W |
| Startup Time | ≤1s |
| Communication Interface | |
| Digital Communication | DeviceNet or RS485 |
| Analog Control | 0~5V |
| Mechanical Parameters | |
| Connector Type | VCR: 1/4 inch, 1/2 inch Ferrule: 1/4 inch, 1/2 inch |
| Wetted Materials | 316L stainless steel |
| Seal Material | FKM fluororubber or all-metal |
| Weight | 1.2kg |
•Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, horizontal position.
•%S.P. means error as percentage of setpoint.
•%F.S. means error as percentage of full scale.
•Response time refers to time to reach ±2% of setpoint.
•Pressure-insensitive: within specified pressure differential range, flow control is not affected by inlet pressure fluctuations.
Key Features
Dual Display
Real-time flow & setpoint
Adjustable Range
Field adjustable range
High Precision
±1.0%F.S. accuracy
Fast Response
≤100ms
Stable & Reliable
Long-term stability
Multi-comm
RS485/Analog
Applications
Downloads
Need More Information?
Contact our professional team for detailed product selection and technical support
Frequently Asked Questions
Disclaimer: The content on this page is for reference only and does not constitute any offer or commitment. Product specifications and parameters are subject to change without notice. Please refer to the actual product manual.