KC80
KC80 Series digital flow controller features electromagnetic interference resistance, high precision, compact size, temperature compensation, low leak rate. Anti-pollution, dust-proof, fast response. High precision operation over wide temperature range, cost-effective. DT4C housing material, suitable for gas mixing, analyzer, vacuum coating, welding, crystal furnace, plasma cleaning and other applications.
Key Takeaways
- High-precision measurement & control, professional Mass Flow Controller (MFC) solution
- MEMS thermal flow sensor chip technology for fast response
- Supports RS485/Modbus/4-20mA multiple communication protocols
- Widely used in semiconductor, new energy, biopharma industries
- Professional selection support and complete after-sales service
Key Specifications
Applications
Model Specifications
| Basic Parameters | |
| Media Requirement | Clean, dry, non-corrosive gas |
| Media Type | Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc. |
| Flow Range¹ (N2 equivalent) | (0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10, 20) slm Other ranges customizable, please contact us |
| Accuracy | ±0.8%F.S.² or ±1.0%S.P.³ Whichever is greater |
| Turndown Ratio | 100:1 |
| Response Time⁴ | ≤1s |
| Repeatability | ≤±0.2%F.S. |
| Resolution | 0.01 sccm, ≤100 sccm 0.1 sccm, ≤1 slm and >100 sccm 1 sccm, ≤5 slm and >1 slm 0.01 slm, >5 slm |
| Leak Rate | ≤1×10⁻⁹ Pam³/sHe |
| Max Pressure Rating | 9.8bar |
| Environmental Conditions | |
| Operating Temperature | 0~50℃ |
| Operating Humidity | 10%~90% R.H. (no condensation) |
| Working Pressure⁵ | 0.5~4 bar, >2 slm 0.5~6 bar, ≤2 slm (range dependent) |
| Storage Temperature | -20~85℃ |
| Electrical Parameters | |
| Power Supply | DC24V |
| Power Consumption | ≤2.7W |
| Startup Time | ≤1s |
| Communication Interface | |
| Interface Type | D-SUB9 |
| Analog Control | 0~5V or 4~20mA |
| Digital Control | RS485 or RS232 |
| Digital Signal (RS485/RS232) | |
| Interface Type | D-SUB9 |
| Baud Rate | 9600 (default), 14400, 19200, 38400, 56000, 57600, 115200 Configurable via command or host software |
| Protocol | Modbus-RTU |
| Device Address | 1 (default) ~250 Configurable via command or host software |
| Mechanical Parameters | |
| Connector Type | Ferrule: 8mm, 1/4inch, 1/8inch Others available |
| Wetted Materials | 316L stainless steel, fluororubber, silica |
| Body Material | Base: 316L stainless steel Housing: Aluminum alloy (KC80) / DT4C (E-P100 Series) |
| Seal Material | FKM fluororubber |
| Weight | 0.90kg |
•Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5 bar differential pressure (inlet 3.5 barA, outlet 1 barA), horizontal position.
•It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise accuracy deviation may occur.
•It is recommended to use the largest possible fittings at the inlet and outlet to avoid additional pressure loss.
•The shown ranges are available for nitrogen.
•%F.S. means error as percentage of full scale.
•%S.P. means error as percentage of setpoint.
•Response time refers to time to reach ±2% of setpoint.
•Working pressure refers to differential pressure between inlet and outlet.
Key Features
Anti-pollution
For complex gas environments
EtherCAT
High-speed real-time comm
Corrosion Resistant
316L stainless steel
Fast Response
≤50ms response
High Precision
±1.0%F.S.
Modular
Easy system integration
Applications
Downloads
Need More Information?
Contact our professional team for detailed product selection and technical support
Frequently Asked Questions
Disclaimer: The content on this page is for reference only and does not constitute any offer or commitment. Product specifications and parameters are subject to change without notice. Please refer to the actual product manual.