QT-COMP Tubeless Compact Solution
QT-COMP tubeless compact solution is designed for OEMs and system integrators seeking maximum space efficiency. One or more mass flow/pressure sensor modules can be combined with control valves, shut-off valves, mixing chambers, filters, or other functional modules on a compact, lightweight yet rugged modular manifold rail. The tubeless design significantly reduces potential leak points, while bottom connections facilitate top/bottom mounting. Supports 3~9 channel flexible configuration. Factory assembled and tested for true "plug-and-play" operation, minimizing on-site commissioning time. Widely used in semiconductor, analytical instruments, biotechnology, chemical processing and other fields.
Key Takeaways
- High-precision measurement & control, professional Flow Control Solutions (FCS) solution
- MEMS thermal flow sensor chip technology for fast response
- Supports RS485/Modbus/4-20mA multiple communication protocols
- Widely used in semiconductor, new energy, biopharma industries
- Professional selection support and complete after-sales service
Key Specifications
Applications
Model Specifications
| Core Performance | |
| Flow Range | 0.06~3 mln/min to 1~50 Ln/min (N₂ equivalent), higher ranges customisable |
| Flow Accuracy | ±0.5%Rd ±0.1%FS (standard); ±1%FS for ranges ≤3.5 mln/min |
| Turndown Ratio | 1:50 (up to 1:187.5 in digital mode) |
| Repeatability | <0.1%FS; <0.2%Rd |
| Settling Time | ≤1.2s (typical above 5%FS) |
| Control Stability | < ±0.1%FS (typical for 1 Ln/min N₂) |
| Sensor Response | <0.1s |
| Zero T-coefficient | <0.05%FS/°C |
| Span T-coefficient | <0.05%Rd/°C |
| Pressure Sensitivity | 0.1%Rd/bar typical (N₂) |
| Warm-up Time | 2 min for ±2%FS; 30 min for optimum accuracy |
| Pressure Module | |
| Pressure Sensor Range | 2~100 mbar to 0.2~10 bar (abs or gauge selectable) |
| Pressure Control Range | 5~100 mbar to 0.5~10 bar (electronic pressure controller) |
| Pressure Accuracy | ±0.5%FS |
| Mechanical & Electrical | |
| Max. Operating Pressure | 10 bar (gauge) |
| Operating Temperature | -10°C ~ +50°C |
| Channel Configuration | 3~9 channels, expandable |
| Manifold Material | Anodized aluminum; 316L stainless steel (optional) |
| Wetted Parts | 316L stainless steel |
| Seals | EPDM standard; Viton/Kalrez (FFKM) optional |
| Filter Module | Sintered SS filter, 0.5/2/7/15 µm selectable |
| Valve Types | NC/NO control valves; solenoid valves (shut-off/3-way) |
| Valve Kv Value | Max Kv=1.0 |
| Valve Max Temp | 50°C |
| Power Supply | 15~24 Vdc |
| Power (Controller) | Max 320 mA |
| Power (Meter) | ~70 mA |
| Solenoid Power | 3W |
| Analog Output | 0-10Vdc (load>2kΩ); 0-20mA/4-20mA (load<375Ω) |
| Analog Setpoint | 0(4)-20mA; 0-(5)10Vdc |
| Digital Comm. | RS232/RS485, Modbus RTU/TCP, DeviceNet, PROFIBUS DP, PROFINET, EtherCAT, FLOW-BUS |
| Electrical Conn. | 9-pin D-sub (analog/RS232/PROFIBUS); 5-pin M12 (DeviceNet); RJ45 (Modbus/EtherCAT/PROFINET) |
| Mounting | Bottom mounting holes for panel/bracket; any orientation |
| Protection | IP40 |
| Cleanroom Assembly | Available on request |
•QT-COMP employs tubeless surface-mount technology, integrating all functional modules on a unified manifold, significantly reducing leak risks and installation space compared to traditional tubing connections.
•Modular design allows flexible configuration: combine MFCs/MFMs, pressure sensors/controllers, filters, mixing chambers, shut-off valves, 3-way valves and other functional modules as needed.
•Bottom connection design allows easy top-access maintenance and module replacement without disconnecting bottom plumbing.
•Fully factory tested and calibrated for "plug-and-play" installation, dramatically reducing on-site commissioning time and cost.
•Supports multiple industrial communication protocols for seamless integration with PLC/DCS/DCIM supervisory systems.
•Face seal fittings, compression fittings or flanges can be configured to meet various industry requirements.
•Typical applications: semiconductor CVD/etching, analytical instrument carrier gas control, bioreactor gas mixing, chemical process control, vacuum/plasma/sputter coating, combustion control, catalyst evaluation, etc.
Key Features
MEMS Flow Chip
High precision measurement
Wide Range
Covers various applications
Fast Response
Real-time flow monitoring
Long-term Stable
Pressure & temperature insensitive
Digital Display
Easy and intuitive operation
Multi-interface
Easy system integration
Applications
Downloads
Need More Information?
Contact our professional team for detailed product selection and technical support
Frequently Asked Questions
Disclaimer: The content on this page is for reference only and does not constitute any offer or commitment. Product specifications and parameters are subject to change without notice. Please refer to the actual product manual.