KP200 Series
KP200 Series all-metal sealed gas pressure controller features long-term stable and reliable operation, high control precision, and good environmental adaptability. Supports upstream control mode, full-scale control pressure 1200mBar, supports RS485, EtherCAT and 0~5V communication. Suitable for semiconductor, photovoltaic, vacuum coating and other industries.
Key Takeaways
- High-precision measurement & control, professional Pressure Measurement & Control solution
- MEMS thermal flow sensor chip technology for fast response
- Supports RS485/Modbus/4-20mA multiple communication protocols
- Widely used in semiconductor, new energy, biopharma industries
- Professional selection support and complete after-sales service
Key Specifications
Applications
Model Specifications
| 基本参数 | |
| 压力类型 | 绝压 |
| 全量程控制压力 | 1200 mBar |
| 耐压 | 3 MPa |
| 控制方式 | 上游 |
| 阀口全量程流量 | 2、3、5 SLM |
| 响应时间 | <1 s |
| 温度系数 | <0.02%FS/℃ |
| 压力分辨率 | 0.1 mBar |
| 压力控制精度 | ±1%SP(≥10%FS) / 0.2%FS(<10%FS) |
| 机械接口 | |
| 机械接口 | 1/4 inch卡套、1/4 inch VCR |
| 电气接口 | M8、RJ45双网口、DB9M |
| 通讯方式 | RS485、EtherCAT、0~5V |
| 阀门特性 | |
| 阀门类型 | 常闭 |
| 外漏率 | <1×10⁻¹² Pa·m³/s (He) |
| 内漏率 | <0.1%FS |
| 电气参数 | |
| 供电电压 | 15~24VDC |
| 环境条件 | |
| 工作温度范围 | 10~50 ℃ |
•KP200系列全金属密封气体压力控制器长期工作稳定可靠，高控制精度。
•适用于半导体、光伏、真空镀膜等行业。
Key Features
High Precision
±0.25%F.S. accuracy
Fast Response
Real-time pressure monitoring
High Pressure
High pressure environments
Corrosion Resistant
316L stainless steel
Multiple Outputs
Analog/Digital signals
Easy Installation
Multiple mounting options
Applications
Downloads
Need More Information?
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Frequently Asked Questions
Disclaimer: The content on this page is for reference only and does not constitute any offer or commitment. Product specifications and parameters are subject to change without notice. Please refer to the actual product manual.