KP200 Series
High PrecisionFast ResponseSmart Control
Pressure Measurement & Control

KP200 Series

KP200 Series all-metal sealed gas pressure controller features long-term stable and reliable operation, high control precision, and good environmental adaptability. Supports upstream control mode, full-scale control pressure 1200mBar, supports RS485, EtherCAT and 0~5V communication. Suitable for semiconductor, photovoltaic, vacuum coating and other industries.

Key Specifications

Pressure TypeAbsolute pressure
Full-scale Control Pressure1200mBar
Pressure Control Accuracy±1%SP(≥10%FS) / 0.2%FS(<10%FS)
Response Time<1s
Pressure Resolution0.1mBar
Max Pressure Rating3MPa
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Model Specifications

基本参数
压力类型绝压
全量程控制压力1200 mBar
耐压3 MPa
控制方式上游
阀口全量程流量2、3、5 SLM
响应时间<1 s
温度系数<0.02%FS/℃
压力分辨率0.1 mBar
压力控制精度±1%SP(≥10%FS) / 0.2%FS(<10%FS)
机械接口
机械接口1/4 inch卡套、1/4 inch VCR
电气接口M8、RJ45双网口、DB9M
通讯方式RS485、EtherCAT、0~5V
阀门特性
阀门类型常闭
外漏率<1×10⁻¹² Pa·m³/s (He)
内漏率<0.1%FS
电气参数
供电电压15~24VDC
环境条件
工作温度范围10~50 ℃

KP200系列全金属密封气体压力控制器长期工作稳定可靠,高控制精度。

适用于半导体、光伏、真空镀膜等行业。

Key Features

High Precision

±0.25%F.S. accuracy

Fast Response

Real-time pressure monitoring

High Pressure

High pressure environments

Corrosion Resistant

316L stainless steel

Multiple Outputs

Analog/Digital signals

Easy Installation

Multiple mounting options

Applications

Laboratory
Medical & Health
Semiconductor
Trace Element Analysis
Oil & Gas
Surface Treatment

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