KC800 Series
KC800 Series pressure-insensitive digital mass flow controller features high precision flow control, full range fast response, pressure-insensitive characteristics, range/gas switching function. Built-in display, user-friendly operation, strictly follows SEMI standards. Designed for semiconductor processes.
Key Specifications
Applications
Model Specifications
| Basic Parameters | |
| Media Requirement | Clean, dry gas |
| Flow Range¹ (N2 equivalent) | (0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10) slm Other ranges customizable, please contact us |
| Accuracy | ±1.0%S.P.² (>25%F.S.) ±0.25%F.S.³ (≤25%F.S.) |
| Turndown Ratio | 50:1 |
| Response Time⁴ | ≤1s |
| Linearity | ≤±0.5%F.S. |
| Repeatability | ≤±0.2%F.S. |
| Leak Rate | ≤1×10⁻⁹ Pam³/sHe |
| Pressure Characteristics | |
| Working Pressure Diff | 50~300 kPa |
| Pressure Fluctuation Compensation | ≤±(5.0%S.P.+1.5%F.S.) @5psi/s |
| Max Pressure Rating | 500 kPa |
| Environmental Conditions | |
| Operating Temperature | 0~50℃ |
| Operating Humidity | 10%~90% R.H. (no condensation) |
| Storage Temperature | -20~85℃ |
| Electrical Parameters | |
| Power Supply | DC24V |
| Power Consumption | ≤4.0W |
| Startup Time | ≤1s |
| Communication Interface | |
| Digital Communication | DeviceNet or RS485 |
| Analog Control | 0~5V |
| Mechanical Parameters | |
| Connector Type | VCR: 1/4 inch, 1/2 inch Ferrule: 1/4 inch, 1/2 inch |
| Wetted Materials | 316L stainless steel |
| Seal Material | FKM fluororubber or all-metal |
| Weight | 1.2kg |
•Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, horizontal position.
•%S.P. means error as percentage of setpoint.
•%F.S. means error as percentage of full scale.
•Response time refers to time to reach ±2% of setpoint.
•Pressure-insensitive: within specified pressure differential range, flow control is not affected by inlet pressure fluctuations.
Key Features
Dual Display
Real-time flow & setpoint
Adjustable Range
Field adjustable range
High Precision
±1.0%F.S. accuracy
Fast Response
≤100ms
Stable & Reliable
Long-term stability
Multi-comm
RS485/Analog
Applications
Downloads
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