KC80
Anti-pollutionEtherCATCorrosion Resistant
Mass Flow Controller (MFC)

KC80

KC80 Series digital flow controller features electromagnetic interference resistance, high precision, compact size, temperature compensation, low leak rate. Anti-pollution, dust-proof, fast response. High precision operation over wide temperature range, cost-effective. DT4C housing material, suitable for gas mixing, analyzer, vacuum coating, welding, crystal furnace, plasma cleaning and other applications.

Key Specifications

Flow Range0~10sccm ~ 0~20slm (N2 equivalent)
Accuracy±0.8%F.S. or ±1.0%S.P. (whichever is greater)
Turndown Ratio100:1
Response Time≤1s
Repeatability≤±0.2%F.S.
CommunicationRS485 / RS232 / 0-5V / 4-20mA
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Model Specifications

Basic Parameters
Media RequirementClean, dry, non-corrosive gas
Media TypeAir, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc.
Flow Range¹ (N2 equivalent)(0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10, 20) slm Other ranges customizable, please contact us
Accuracy±0.8%F.S.² or ±1.0%S.P.³ Whichever is greater
Turndown Ratio100:1
Response Time⁴≤1s
Repeatability≤±0.2%F.S.
Resolution0.01 sccm, ≤100 sccm 0.1 sccm, ≤1 slm and >100 sccm 1 sccm, ≤5 slm and >1 slm 0.01 slm, >5 slm
Leak Rate≤1×10⁻⁹ Pam³/sHe
Max Pressure Rating9.8bar
Environmental Conditions
Operating Temperature0~50℃
Operating Humidity10%~90% R.H. (no condensation)
Working Pressure⁵0.5~4 bar, >2 slm 0.5~6 bar, ≤2 slm (range dependent)
Storage Temperature-20~85℃
Electrical Parameters
Power SupplyDC24V
Power Consumption≤2.7W
Startup Time≤1s
Communication Interface
Interface TypeD-SUB9
Analog Control0~5V or 4~20mA
Digital ControlRS485 or RS232
Digital Signal (RS485/RS232)
Interface TypeD-SUB9
Baud Rate9600 (default), 14400, 19200, 38400, 56000, 57600, 115200 Configurable via command or host software
ProtocolModbus-RTU
Device Address1 (default) ~250 Configurable via command or host software
Mechanical Parameters
Connector TypeFerrule: 8mm, 1/4inch, 1/8inch Others available
Wetted Materials316L stainless steel, fluororubber, silica
Body MaterialBase: 316L stainless steel Housing: Aluminum alloy (KC80) / DT4C (E-P100 Series)
Seal MaterialFKM fluororubber
Weight0.90kg

Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5 bar differential pressure (inlet 3.5 barA, outlet 1 barA), horizontal position.

It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise accuracy deviation may occur.

It is recommended to use the largest possible fittings at the inlet and outlet to avoid additional pressure loss.

The shown ranges are available for nitrogen.

%F.S. means error as percentage of full scale.

%S.P. means error as percentage of setpoint.

Response time refers to time to reach ±2% of setpoint.

Working pressure refers to differential pressure between inlet and outlet.

Key Features

Anti-pollution

For complex gas environments

EtherCAT

High-speed real-time comm

Corrosion Resistant

316L stainless steel

Fast Response

≤50ms response

High Precision

±1.0%F.S.

Modular

Easy system integration

Applications

Bioprocess
Other Industries
Medical & Health
Food & Pharma
Semiconductor
Analytics

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