KP300 Series
KP300 Series pressure controller features ultra-compact size for system integration, cost-effective solution, high precision and high resolution, excellent zero stability, good repeatability, ultra-fast response time. Suitable for semiconductor wafer helium cooling system, liquid source pressure control system, MOCVD vapor pressure control and other applications.
Key Takeaways
- High-precision measurement & control, professional Pressure Measurement & Control solution
- MEMS thermal flow sensor chip technology for fast response
- Supports RS485/Modbus/4-20mA multiple communication protocols
- Widely used in semiconductor, new energy, biopharma industries
- Professional selection support and complete after-sales service
Key Specifications
Applications
Model Specifications
| Pressure Control Parameters | |
| Pressure Control Range | 0~50/100 Torr |
| Pressure Control Accuracy | ±0.5%F.S. |
| Control Range | 1~100%F.S. |
| Response Time | ≤1s |
| Flow Detection Parameters | |
| Flow Detection Range (NH3) | 0~20/50/100 sccm (please contact us for others) |
| Flow Detection Accuracy | 0~25%F.S.: <0.3%F.S. >25%F.S.: 1%RD |
| Leak Rate | |
| External Leak Rate | ≤1×10⁻¹² Pa·m³/s (N2) |
| Internal Leak Rate | <0.1 sccm (N2) |
| Electrical Parameters | |
| Power Supply | 18~32V (24V recommended) |
| Pressure Signal Output | 0~10V |
| Flow Signal Output | 0~5V |
| Communication Interface | |
| Communication | RS485, EtherCAT, DeviceNet |
| Mechanical Parameters | |
| Connector Type | 1/4 VCR |
| Inlet Pressure Range | 1.5~3 bar |
| Environmental Conditions | |
| Operating Temperature | 15~40℃ |
•KP300 Series features ultra-compact size, suitable for system integration.
•Cost-effective solution with high precision and high resolution.
•Suitable for semiconductor wafer helium cooling system, liquid source pressure control system, MOCVD vapor pressure control.
Key Features
Highly Integrated
One-stop gas path solution
Compact Design
Space saving
Easy Installation
Ready to use
Customizable
Tailored to needs
High Reliability
Overall testing verified
Professional Design
Engineer team support
Applications
Downloads
Need More Information?
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Frequently Asked Questions
Disclaimer: The content on this page is for reference only and does not constitute any offer or commitment. Product specifications and parameters are subject to change without notice. Please refer to the actual product manual.