MFC / GAS FLOW
Product appearance varies by configuration.
Mass Flow Controller (MFC)
KC800 Series
The KC800 Series digital mass flow controller is designed to maintain stable flow control under changing inlet pressure. A built-in display supports operation and configuration, including gas selection and range adjustment. It is intended for semiconductor process applications.
- Range
- 0~10 sccm to 0~10 slm (nitrogen equivalent)
- Accuracy
- ±1.0%S.P. (>25%F.S.) / ±0.25%F.S. (≤25%F.S.)
- Turndown Ratio
- 50:1
- Response Time
- ≤1s
Configuration and suitability confirmed for your application.
Basic Parameters
| Media Requirement | Clean, dry gas |
| Flow Range¹ (Nitrogen Equivalent) | (0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10) slm Other ranges customizable, please contact us |
| Accuracy | ±1.0%S.P.² (>25%F.S.) ±0.25%F.S.³ (≤25%F.S.) |
| Turndown Ratio | 50:1 |
| Response Time⁴ | ≤1s |
| Linearity | ≤±0.5%F.S. |
| Repeatability | ≤±0.2%F.S. |
| Leak Rate | ≤1×10⁻⁹ Pam³/sHe |
Pressure Characteristics
| Working Pressure Diff | 50~300 kPa |
| Pressure Fluctuation Compensation | ≤±(5.0%S.P.+1.5%F.S.) @5psi/s |
| Max Pressure Rating | 500 kPa |
Environmental Conditions
| Operating Temperature | 0~50℃ |
| Operating Humidity | 10%~90% R.H. (no condensation) |
| Storage Temperature | -20~85℃ |
Electrical Parameters
| Power Supply | DC24V |
| Power Consumption | ≤4.0W |
| Startup Time | ≤1s |
Communication Interface
| Digital Comm. | DeviceNet or RS485 |
| Analog Control | 0~5V |
Mechanical Parameters
| Connector Type | VCR: 1/4 inch, 1/2 inch Ferrule: 1/4 inch, 1/2 inch |
| Wetted Materials | 316L stainless steel |
| Seal Material | FKM fluororubber or all-metal |
| Weight | 1.2kg |
Measurement conditions & notes
- Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, horizontal position.
- %S.P. means error as percentage of setpoint.
- %F.S. means error as percentage of full scale.
- Response time refers to time to reach ±2% of setpoint.
- Pressure-insensitive: within specified pressure differential range, flow control is not affected by inlet pressure fluctuations.
Confirm fluid compatibility, materials, connections, and available configuration with our team before ordering.
